Probe Stations


Manual Probe Stations 150, 200 or 300 mm
Special entry level cheap packages for DC, RF or mmW applications for university and R&D labs.
Hot chucks available for test in positive temperature.
Selection of microscopes available and compatible with cameras or laser cutter

Semiautomatic Stations 200 or 300 mm
Micro-chamber versions to test in the range -65 to 300°C
Compatible with positioners for DC, RF, mmW or light wave probes
Attoguard/Pureline versions for unsurpassed level of shielding
Designed to meet the ITRS roadmap

Special Version Stations for:
- Power application (high current and high voltage) TESLA model;
- flicker noise (1/f) application with EDGE model
- double side probe system;
- cryogenic, vacuum or under pressure measurements, with a dedicated selection of manual and semiautomatic versions inside special chambers.

more info on:




MPS 150

The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. Pre-configured application-focused probing solutions are available with everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. The MPS150 is the industry’s probe platform of choice.

The MPS150 platform supports a wide variety of applications such as I-V/C-V, radio frequency (RF), millimeter-wave (mmW) and sub-THz measurements, device and wafer characterization tests (DWC), failure analysis (FA), submicron probing, MEMS, optoelectronic engineering tests and more. Its stable platen is designed to accommodate up to sixteen positioners, providing a function similar to a probe card for special wafer-level reliability (WLR) applications. Download Data Sheet.



The Summit series semi-automated probe systems, with PureLine™ and AttoGuard® technologies, allow you to access the full range of your test instruments for wafers up to 200 mm. Whatever your application: RF/Microwave, device characterization,  wafer-level reliability, e-test, modeling or yield enhancement, the Summit leads the industry in on-wafer measurements.

Summit series probe systems are easy to configure with your choice of measurement performance, chuck size, thermal range and microscope options. All platforms are -60°C to 300°C compatible to ensure an upgrade path to meet your future needs. FormFactor provides many accessories for the Summit for a wide range of applications to suit your unique wafer probing test needs.Download Data Sheet.


The new Cascade SUMMIT200 advanced probing system, is essential for collecting high accuracy measurement data as fast as possible.

Designed for R&D and device characterization/modelling applications, the SUMMIT200 enables precision electrical measurements over temperature for DC, RF, mmW and THz applications, with semi-automatic operation for fastest time to accurate data.

A new advanced 200 mm fast stage, high throughput test features, and a temperature range from ambient to 300°C, provides the core functionalities needed for the scientist or R&D and test engineer to get their job done fast.

The SUMMIT200 supports Contact Intelligence™ – a unique technology which guarantees to make and hold wafer contact with constant high quality. A powerful combination of innovative system design and state of the art image processing provides an operator-independent solution to achieve highly-reliable measurement data at any time.


The Tesla semi-automatic power device characterization system provides a complete on-wafer solution for over-temperature, low-contact resistance measurements of power semiconductors up to 3,000 V (triax)/10,000 V (coax) and 200 A (pulsed)/10 A (DC)., while providing  a low-noise, fully guarded and shielded test environment, as well an infrared laser light curtain and safety interlock system.Download Data Sheet.



FormFactor’s CM300 is a flexible engineering on-wafer probe system that scales to meet your evolving needs. By capturing the true electrical performance of devices, it helps you produce high-integrity data and achieve hands-off productivity. With Velox™ probe station control software, the CM300 enables safe and fast wafer loading and easy test automation and measurement.Download Data Sheet.

Features and Benefits

  • Scalable from semi-automated to fully-automated prober or dual-prober system
  • Fully-shielded, shielded and open systems available depending on customer measurement requirements
  • High-Temperature Stability (HTS) solution elements and automated test management capability enables small pad probing down to 30 microns
  • Fast delivery of a wide variety of precise model parameters to enhance process and device development
  • Velox software simplifies wafer loading operation, test automation and measurement system


FormFactor has evolved its probe station user environment to an unprecedented level of power and efficiency with the latest release of Velox. Velox consolidates our Nucleus™ and ProberBench™ system software packages into a universal platform that offers extraordinary gains in speed and productivity.

Velox provides yet another proof point why Cascade Microtech leads the way forward in wafer probing systems and technology. Velox delivers the single most powerful and flexible user environment available in the semiconductor lab.Download Velox Brochure

ControlCenter Tutorial
Understand the function of each of the modules.
WaferMap Tutorial
Learn how to quickly create wafer maps.
 CellView Tutorial
See how easy it is to navigate sub dies.